| 8823919 |
Lithographic apparatus, removable member and device manufacturing method |
Nina Vladimirovna Dziomkina, Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij +4 more |
2014-09-02 |
| 8755028 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2014-06-17 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2014-04-01 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-03-25 |
| 8659741 |
Lithographic apparatus, removable member and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij, Martijn Houben +4 more |
2014-02-25 |
| 8587762 |
Methods relating to immersion lithography and an immersion lithographic apparatus |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Marcel Beckers, Paul Petrus Joannes Berkvens, David Lucien Anstotz |
2013-11-19 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2013-07-09 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2013-05-21 |
| 8432531 |
Lithographic apparatus and a method of operating the apparatus |
Kornelis Tijmen Hoekerd, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Pieter Jacob Kramer +4 more |
2013-04-30 |
| 8246838 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2012-08-21 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2012-08-21 |
| 8243255 |
Lithographic apparatus and in-line cleaning apparatus |
Hans Jansen, Bauke Jansen, Hubertus Leonardus Franciscus Heusschen |
2012-08-14 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2012-03-20 |
| 8115903 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2012-02-14 |
| 8107053 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2012-01-31 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2011-10-04 |
| 8004652 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johannes Herman Maria Teunissen +4 more |
2011-08-23 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2011-04-19 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2011-04-19 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2010-04-20 |
| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hernes Jacobs +7 more |
2009-12-15 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christian Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2009-10-13 |
| 7468779 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2008-12-23 |
| 7433016 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2008-10-07 |