Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7428038 | Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid | Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek | 2008-09-23 |
| 7378025 | Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method | Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay | 2008-05-27 |