| 8772850 |
Embedded DRAM memory cell with additional patterning layer for improved strap formation |
Kangguo Cheng, David M. Dobuzinsky, Byeong Y. Kim |
2014-07-08 |
| 8492821 |
Enhanced capacitance trench capacitor |
Kangguo Cheng, Byeong Y. Kim, James P. Norum |
2013-07-23 |
| 8426268 |
Embedded DRAM memory cell with additional patterning layer for improved strap formation |
Kangguo Cheng, David M. Dobuzinsky, Byeong Y. Kim |
2013-04-23 |
| 8227311 |
Method of forming enhanced capacitance trench capacitor |
Kangguo Cheng, Byeong Y. Kim, James P. Norum |
2012-07-24 |
| 8003488 |
Shallow trench isolation structure compatible with SOI embedded DRAM |
Kangguo Cheng, David M. Dobuzinsky, Byeong Y. Kim |
2011-08-23 |
| 7871893 |
Method for non-selective shallow trench isolation reactive ion etch for patterning hybrid-oriented devices compatible with high-performance highly-integrated logic devices |
Gregory Costrini, David M. Dobuzinsky, Thomas S. Kanarsky, Christopher D. Sheraw, Richard S. Wise |
2011-01-18 |
| 7592245 |
Poly filled substrate contact on SOI structure |
David M. Dobuzinsky, Byeong Y. Kim, Effendi Leobandung, Brian L. Tessier |
2009-09-22 |
| 7393738 |
Subground rule STI fill for hot structure |
Byeong Y. Kim, Frank D. Tamweber, Xiaomeng Chen |
2008-07-01 |
| 7358172 |
Poly filled substrate contact on SOI structure |
David M. Dobuzinsky, Byeong Y. Kim, Effendi Leobandung, Brian L. Tessier |
2008-04-15 |
| 6893938 |
STI formation for vertical and planar transistors |
Hiroyuki Akatsu, Byeong Y. Kim, Rolf Weis, David Mark Dobuzinksy, Johnathan E. Faltermeier |
2005-05-17 |
| 6890815 |
Reduced cap layer erosion for borderless contacts |
Johnathan E. Faltermeier, Jeremy K. Stephens, David M. Dobuzinsky, Larry Clevenger, Chienfan Yu +3 more |
2005-05-10 |
| 6821900 |
Method for dry etching deep trenches in a substrate |
Satish D. Athavale, Rajiv Ranade, Gangadhara S. Mathad |
2004-11-23 |
| 6733602 |
Polycrystalline material with surface features projecting from a surface thereof |
Lawrence A. Clevenger |
2004-05-11 |
| 6566219 |
Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench opening |
Gerhard Kunkel, Shahid Butt, Ramachandra Divakaruni, Armin Reith |
2003-05-20 |
| 6555204 |
Method of preventing bridging between polycrystalline micro-scale features |
Lawrence A. Clevenger |
2003-04-29 |
| 6551942 |
Methods for etching tungsten stack structures |
— |
2003-04-22 |
| 6544838 |
Method of deep trench formation with improved profile control and surface area |
Rajiv Ranade, Gangadhara S. Mathad |
2003-04-08 |
| 6464806 |
Method of forming extruded structures from polycrystalline materials and devices formed thereby |
Lawrence A. Clevenger |
2002-10-15 |
| 6359325 |
Method of forming nano-scale structures from polycrystalline materials and nano-scale structures formed thereby |
Lawrence A. Clevenger |
2002-03-19 |
| 6284666 |
Method of reducing RIE lag for deep trench silicon etching |
Gangadhara S. Mathad, Byeong Y. Kim, Stephan Kudelka, Brian Lee, Heon Lee +3 more |
2001-09-04 |
| 6002136 |
Microscope specimen holder and grid arrangement for in-situ and ex-situ repeated analysis |
— |
1999-12-14 |
| 5976986 |
Low pressure and low power C1.sub.2 /HC1 process for sub-micron metal etching |
Stuart M. Burns, Rosemary Christie, Virinder Grewal, Walter W. Kocon, Masaki Narita +2 more |
1999-11-02 |
| 5846884 |
Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing |
Stuart M. Burns, Nancy Anne Greco, STEVE GRECO, Virinder Grewal, Ernest N. Levine +2 more |
1998-12-08 |