Issued Patents All Time
Showing 1–25 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894482 | Systems and methods for making solar panels or components thereof | — | 2024-02-06 |
| 11888082 | Systems and methods for making solar panels or components thereof | — | 2024-01-30 |
| 11024762 | Substrate processing system, substrate conveying device and conveying method | — | 2021-06-01 |
| 10854497 | Apparatus and method of selective turning over a row of substrates in an array of substrates in a processing system | — | 2020-12-01 |
| 9031685 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2015-05-12 |
| 8626330 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2014-01-07 |
| 8367565 | Methods and systems of transferring, docking and processing substrates | Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2013-02-05 |
| 8342119 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Salvador P. Umotoy, Tom Madar, Girish Dixit, Gwo-Chuan Tzu | 2013-01-01 |
| 8268734 | Methods and systems of transferring, docking and processing substrates | Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2012-09-18 |
| 8110511 | Methods and systems of transferring a substrate to minimize heat loss | Alfred Mak, Rex Liu, Kon Park, Tzy-Chung Terry Wu, Simon Zhu +2 more | 2012-02-07 |
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2011-09-27 |
| 7923069 | Multi-station deposition apparatus and method | Mei Chang, Walter Glenn | 2011-04-12 |
| 7897525 | Methods and systems of transferring, docking and processing substrates | Alfred Mak, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2011-03-01 |
| 7860597 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2010-12-28 |
| 7846840 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Alfred Mak, Jeong Soo Byun, Hua Chung | 2010-12-07 |
| 7794789 | Multi-station deposition apparatus and method | Mei Chang, Walter Glenn | 2010-09-14 |
| 7777483 | Method and apparatus for measuring a thickness of a layer of a wafer | Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham, Yu Gu +3 more | 2010-08-17 |
| 7722719 | Gas baffle and distributor for semiconductor processing chamber | Siqing Lu, Steven Gianoulakis, Won Bae Bang, David Sun, Yen-Kun Wang | 2010-05-25 |
| 7705275 | Substrate support having brazed plates and resistance heater | Salvador P. Umotoy, Gwo-chun Tzu, Xiangxiong (John) Yuan, Michael S. Jackson, Hymam Lam | 2010-04-27 |
| 7674715 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Alfred Mak, Jeong Soo Byun, Hua Chung, Ashok Sinha +1 more | 2010-03-09 |
| 7660644 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2010-02-09 |
| 7547465 | Multi-station deposition apparatus and method | Mei Chang, Walter Glenn | 2009-06-16 |
| 7465666 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Alfred Mak, Jeong Soo Byun, Hua Chung, Ashok Sinha +1 more | 2008-12-16 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate | Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham, Yu Gu +3 more | 2008-04-08 |
| 7235486 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Alfred Mak, Jeong Soo Byun, Hua Chung, Ashok Sinha +1 more | 2007-06-26 |