Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179310 | Output signal processing apparatus for eddy current sensor | Atsushi Abe, Taro Takahashi, Hiroaki Shibue, Shinpei Tokunaga | 2024-12-31 |
| 12076834 | Eddy current sensor | Atsushi Abe, Taro Takahashi | 2024-09-03 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Hozumi Yasuda, Yu Ishii | 2024-07-16 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura +4 more | 2024-06-25 |
| 11833636 | Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate | Yoichi Shiokawa, Keita Yagi, Akira Nakamura | 2023-12-05 |
| 11759912 | Magnetic element and eddy current sensor using the same | Taro Takahashi, Hiroaki Shibue | 2023-09-19 |
| 11673222 | Polishing head system and polishing apparatus | Itsuki Kobata | 2023-06-13 |
| 11465254 | Polishing machine and a polishing method for a substrate | Itsuki Kobata, Hozumi Yasuda, Yuji Yagi, Nobuyuki Takahashi, Koichi Takeda | 2022-10-11 |
| 11450544 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2022-09-20 |
| 10665487 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2020-05-26 |
| 10500691 | Substrate processing apparatus and substrate processing method | Masayoshi Imai, Katsuhiko Tokushige, Suguru Ogura, Junji Kunisawa, Takeshi Iizumi +1 more | 2019-12-10 |
| 10056277 | Polishing method | Yoichi Kobayashi, Yoichi Shiokawa | 2018-08-21 |
| 9999955 | Polishing apparatus and polished-state monitoring method | Yoichi Kobayashi, Yoichi Shiokawa, Keita Yagi, Masaki Kinoshita | 2018-06-19 |
| 9687955 | Polishing apparatus | Masakazu Ihara | 2017-06-27 |
| 9156130 | Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Hisanori Matsuo, Kuniaki Yamaguchi | 2015-10-13 |
| 9149903 | Polishing apparatus having substrate holding apparatus | Makoto Fukushima, Hozumi Yasuda, Satoru Yamaki | 2015-10-06 |
| 9108292 | Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus | Takahiro SHIMANO, Mutsumi Tanikawa, Hisanori Matsuo, Kuniaki Yamaguchi | 2015-08-18 |
| 9073170 | Polishing apparatus having thermal energy measuring means | Makoto Fukushima, Hozumi Yasuda, Satoru Yamaki | 2015-07-07 |
| D729753 | Elastic membrane for semiconductor wafer polishing | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Keisuke Namiki | 2015-05-19 |
| 8951813 | Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturing | Takeshi Iizumi, Yoichi Kobayashi | 2015-02-10 |
| 8932106 | Polishing apparatus having thermal energy measuring means | Makoto Fukushima, Hozumi Yasuda, Satoru Yamaki | 2015-01-13 |
| 8859070 | Elastic membrane | Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Satoru Yamaki +1 more | 2014-10-14 |
| D711330 | Elastic membrane for semiconductor wafer polishing | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Keisuke Namiki | 2014-08-19 |
| 8382558 | Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method | Ryuichi Kosuge, Soichi Isobe | 2013-02-26 |