Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379668 | Methods and systems for measurement of semiconductor structures with multi-pass statistical optimization | Daniel J. Haxton | 2025-08-05 |
| 12320763 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, Andrei Veldman, Sergey Zalubovsky | 2025-06-03 |
| 11428650 | Computationally efficient x-ray based overlay measurement | Andrei V. Shchegrov, Michael S. Bakeman | 2022-08-30 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, Andrei Veldman, Sergey Zalubovsky | 2022-04-26 |
| 11305178 | Chess variant including additional player piece and method of play | — | 2022-04-19 |
| 11099137 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2021-08-24 |
| 11073487 | Methods and systems for characterization of an x-ray beam with high spatial resolution | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo, Antonio Arion Gellineau, Alexander Kuznetsov +1 more | 2021-07-27 |
| 10983227 | On-device metrology using target decomposition | Antonio Arion Gellineau, Alexander Kuznetsov | 2021-04-20 |
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2020-10-06 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, Andrei Veldman, Sergey Zalubovsky | 2020-09-15 |
| 10677586 | Phase revealing optical and X-ray semiconductor metrology | Andrei Veldman | 2020-06-09 |
| 10545104 | Computationally efficient X-ray based overlay measurement | Andrei V. Shchegrov, Michael S. Bakeman | 2020-01-28 |
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | Antonio Arion Gellineau, Nikolay Artemiev, Joseph A. Di Regolo | 2019-11-19 |
| 10325004 | Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu | 2019-06-18 |
| 10324050 | Measurement system optimization for X-ray based metrology | Andrei V. Shchegrov, Michael S. Bakeman | 2019-06-18 |
| 10062157 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens | 2018-08-28 |
| 9846132 | Small-angle scattering X-ray metrology systems and methods | Michael S. Bakeman, Andrei V. Shchegrov, Ady Levy, Guorong V. Zhuang | 2017-12-19 |
| 9523800 | Computation efficiency by iterative spatial harmonics order truncation | Andrei Veldman | 2016-12-20 |
| 9518916 | Compressive sensing for metrology | Stilian Ivanov Pandev, Alexander Kuznetsov, Gregory Brady, Andrei V. Shchegrov, Noam Sapiens | 2016-12-13 |
| 9494535 | Scatterometry-based imaging and critical dimension metrology | Abdurrahman Sezginer, Michael S. Bakeman | 2016-11-15 |
| 9310296 | Optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu | 2016-04-12 |
| 8798966 | Measuring critical dimensions of a semiconductor structure | Daniel Wack, Edward Ratner, Yaoming SHI, Andrei Veldman | 2014-08-05 |
| 8760649 | Model-based metrology using tesselation-based discretization | Andrei Veldman | 2014-06-24 |
| 8666703 | Method for automated determination of an optimally parameterized scatterometry model | Jason Ferns, Serguei Komarov, Thaddeus Gerard Dziura | 2014-03-04 |
| 8381140 | Wide process range library for metrology | Wen Jin, Junwei Bao | 2013-02-19 |