Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416081 | Manifolds for uniform vapor deposition | David Marquardt, Andrew Michael Yednak, III, Eric James Shero | 2025-09-16 |
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Eric James Shero, Bhushan Zope | 2025-09-02 |
| 12366410 | Apparatus for processing a plurality of substrates provided with an extractor chamber | Theodorus G.M. Oosterlaken, Adriaan Garssen, Lucian Jdira | 2025-07-22 |
| 12195852 | Substrate processing apparatus with an injector | Kornelius Haanstra, Lucian Jdira, Chris G. M. de Ridder, Robin Roelofs, Werner Knaepen | 2025-01-14 |
| 12077854 | Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas | Dieter Pierreux, Theodorus G.M. Oosterlaken, Lucian Jdira, Bert Jongbloed | 2024-09-03 |
| 11971217 | Batch furnace assembly and method of operating a batch furnace assembly | Theodorus G.M. Oosterlaken, Lucian Jdira | 2024-04-30 |
| 11926894 | Reactant vaporizer and related systems and methods | Mohith Verghese, Eric James Shero, Carl Louis White, Kyle Fondurulia | 2024-03-12 |
| 11404302 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Eric James Shero, Bhushan Zope | 2022-08-02 |
| 10844484 | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods | Lucian Jdira, Naoto Tsuji, Yoshio Susa | 2020-11-24 |
| 10844486 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Carl Louis White, Dan Maurice | 2020-11-24 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Michael Halpin, Carl Louis White, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10605530 | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace | Lucian Jdira, Chris G. M. de Ridder, Theodorus G.M. Oosterlaken, Klaas P. Boonstra, Juul Keijser | 2020-03-31 |
| 10480072 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Carl Louis White, Dan Maurice | 2019-11-19 |
| 10468291 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2019-11-05 |
| 10370761 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Jerry Winkler | 2019-08-06 |
| 9574268 | Pulsed valve manifold for atomic layer deposition | Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Jerry Winkler | 2017-02-21 |
| 9431238 | Reactive curing process for semiconductor substrates | Bert Jongbloed, Dieter Pierreux, Cornelius A. van der Jeugd, Lucian Jdira, Radko G. Bankras +1 more | 2016-08-30 |
| 9394608 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Carl Louis White, Dan Maurice | 2016-07-19 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2016-06-07 |
| 9238867 | Apparatus and method for high-throughput atomic layer deposition | Ernst Hendrik August Granneman | 2016-01-19 |
| 8215264 | Atomic layer deposition apparatus | Kyung Il Hong, Dae Youn Kim, Hyung Sang Park, Sang Jin Jeong, Wonyong Koh | 2012-07-10 |
| 8211230 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Eric James Shero, Darko Babic +2 more | 2012-07-03 |
| 7976898 | Atomic layer deposition apparatus | Kyung Il Hong, Dae Youn Kim, Hyung Sang Park, Sang Jin Jeong, Wonyong Koh | 2011-07-12 |
| 7410355 | Method for the heat treatment of substrates | Ernst Hendrik August Granneman, Vladimir Kuznetsov, Xavier Pages, Pascal Vermont, Gert-Jan Snijders | 2008-08-12 |
| 7128570 | Method and apparatus for purging seals in a thermal reactor | Theodorus Gerardus Maria Oosterlaken, Frank Huussen, Jack Herman Van Putten | 2006-10-31 |