Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339474 | Atomic layer deposition apparatus and method for processing substrates using an apparatus | Leilei HU | 2022-05-24 |
| 10837107 | Method and apparatus for contactlessly advancing substrates | Vladimir Kuznetsov | 2020-11-17 |
| 10738382 | Substrate processing apparatus | Pieter Tak | 2020-08-11 |
| 10648078 | Atomic layer deposition apparatus and method for processing substrates using an apparatus | Leilei HU | 2020-05-12 |
| 9478449 | Floating substrate monitoring and control device, and method for the same | Pascal Vermont, Wilhelmus Gerardus Van Velzen, Vladimir Kuznetsov, Gonzalo Felipe Ramirez Troxler | 2016-10-25 |
| 9243330 | Apparatus and method for high-throughput atomic layer deposition | Sebastiaan E. van Nooten | 2016-01-26 |
| 9238867 | Apparatus and method for high-throughput atomic layer deposition | Herbert Terhorst | 2016-01-19 |
| 7410355 | Method for the heat treatment of substrates | Vladimir Kuznetsov, Xavier Pages, Pascal Vermont, Herbert Terhorst, Gert-Jan Snijders | 2008-08-12 |
| 7312156 | Method and apparatus for supporting a semiconductor wafer during processing | Frank Huussen | 2007-12-25 |
| 7048488 | Apparatus for transferring wafer and ring | Vladimir Kuznetsov, Theodorus Gerardus Maria Oosterlaken, Christianus Gerardus Maria Ridder | 2006-05-23 |
| 7022627 | Method for the heat treatment of substrates | Vladimir Kuznetsov, Xavier Pages, Pascal Vermont | 2006-04-04 |
| 6877250 | Apparatus, method and system for the treatment of a wafer | Vladimir Kuznetsov, Gert-Jan Snijders | 2005-04-12 |
| 6843201 | Temperature control for single substrate semiconductor processing reactor | Vladimir Kuznetsov, Ruud Grisel | 2005-01-18 |
| 6805749 | Method and apparatus for supporting a semiconductor wafer during processing | Frank Hunssen | 2004-10-19 |
| 6770851 | Method and apparatus for the treatment of substrates | Vladimir Kuznetsov, Arjen Storm, Herbert Terhorst | 2004-08-03 |
| 6613685 | Method for supporting a semiconductor wafer during processing | Frank Huussen | 2003-09-02 |
| 6607602 | Device for processing semiconductor wafers | Albert Hasper, Jan Zinger | 2003-08-19 |
| 6560896 | Apparatus, method and system for the treatment of a wafer | Vladimir Kuznetsov, Gert-Jan Snijders | 2003-05-13 |
| 6461439 | Apparatus for supporting a semiconductor wafer during processing | Frank Huussen | 2002-10-08 |
| 6329304 | Floating wafer reactor and method for the regulation of the temperature thereof | Vladimir Kuznetsov | 2001-12-11 |
| 6240875 | Vertical oven with a boat for the uniform treatment of wafers | Margreet Obertine Anne-Marie Van Wijck, Rudi Wilhelm | 2001-06-05 |
| 6183565 | Method and apparatus for supporting a semiconductor wafer during processing | Frank Huussen | 2001-02-06 |