Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948790 | Heater support kit for bevel etch chamber | Tuan Nguyen, Jeongmin Lee, Abdul Aziz Khaja | 2024-04-02 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11560623 | Methods of reducing chamber residues | Liangfa Hu, Prashant Kumar Kulshreshtha, Abdul Aziz Khaja, Viren Kalsekar, Vinay Prabhakar +5 more | 2023-01-24 |
| 10903066 | Heater support kit for bevel etch chamber | Tuan Nguyen, Jeongmin Lee, Abdul Aziz Khaja | 2021-01-26 |
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Sidharth Bhatia, Zhili Zuo, Hidehiro Kojiri, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |
| 9589773 | In-situ etch rate determination for chamber clean endpoint | Sidharth Bhatia, Abdul Aziz Khaja | 2017-03-07 |
| 8445078 | Low temperature silicon oxide conversion | Jingmei Liang, Nitin K. Ingle, Sukwon Hong | 2013-05-21 |
| 7967913 | Remote plasma clean process with cycled high and low pressure clean steps | Zhong Qiang Hua, Sanjay Kamath, Young S. Lee, Ellie Yieh, Hien Minh Le +1 more | 2011-06-28 |
| 7935643 | Stress management for tensile films | Jingmei Liang, Nitin K. Ingle, Shankar Venkataraman | 2011-05-03 |
| 7628897 | Reactive ion etching for semiconductor device feature topography modification | Hemant P. Mungekar, Manoj Vellaikal, Anchuan Wang, Bikram Kapoor | 2009-12-08 |