| 12159796 |
Systems and methods for integrating load locks into a factory interface footprint space |
Jacob Newman, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti |
2024-12-03 |
| 12142508 |
Factory interface robots usable with integrated load locks |
Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Michael R. Rice +6 more |
2024-11-12 |
| 11894251 |
Transport system |
Jacob Newman, Ulrich Oldendorf, Martin Aenis, Shay Assaf, Jeffrey C. Hudgens +2 more |
2024-02-06 |
| 11817332 |
Multi-wafer volume single transfer chamber facet |
William T. Weaver, Shay Assaf, Jacob Newman |
2023-11-14 |
| 11637004 |
Alignment module with a cleaning chamber |
Alexander Lerner, Michael P. Karazim, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more |
2023-04-25 |
| 11581203 |
Systems for integrating load locks into a factory interface footprint space |
Jacob Newman, Michael R. Rice, Paul B. Reuter, Shay Assaf, Sushant S. Koshti |
2023-02-14 |
| 11538706 |
System and method for aligning a mask with a substrate |
Alexander Lerner, Michael P. Karazim, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more |
2022-12-27 |
| 11469124 |
Contactless latch and coupling for vacuum wafer transfer cassette |
Shreyas Patil Shanthaveeraswamy, Ribhu Gautam, Kumaresan Nagarajan, Vijay Singh, Michael P. Karazim +1 more |
2022-10-11 |
| 11414740 |
Processing system for forming layers |
Alexander Lerner, Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni +4 more |
2022-08-16 |
| 11232965 |
Transport system |
Jacob Newman, Ulrich Oldendorf, Martin Aenis, Shay Assaf, Jeffrey C. Hudgens +2 more |
2022-01-25 |
| 11047039 |
Substrate carrier having hard mask |
Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Kevin Moraes +4 more |
2021-06-29 |
| 10818525 |
Ambient controlled transfer module and process system |
Shay Assaf, Jacob Newman, Charles T. Carlson, William T. Weaver, Stephen C. Hickerson |
2020-10-27 |
| 10427303 |
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman +4 more |
2019-10-01 |
| 10361104 |
Ambient controlled transfer module and process system |
Shay Assaf, Jacob Newman, Charles T. Carlson, William T. Weaver, Stephen C. Hickerson |
2019-07-23 |
| 9696097 |
Multi-substrate thermal management apparatus |
Kallol Bera, Kim Vellore, Jacob Newman, Jeffrey Blahnik, Jason M. Schaller +3 more |
2017-07-04 |
| 9281222 |
Wafer handling systems and methods |
William T. Weaver, Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman +4 more |
2016-03-08 |
| 7833351 |
Batch processing platform for ALD and CVD |
Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Efrain Quiles +3 more |
2010-11-16 |
