Issued Patents All Time
Showing 25 most recent of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12043895 | Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors | Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan | 2024-07-23 |
| 11970775 | Showerhead for providing multiple materials to a process chamber | Prashanth Kothnur, Satish Radhakrishnan, Sergei Klimovich, Roey Shaviv | 2024-04-30 |
| 11834743 | Segmented showerhead for uniform delivery of multiple precursors | Prashanth Kothnur, Roey Shaviv, Satish Radhakrishnan | 2023-12-05 |
| 11756816 | Carrier FOUP and a method of placing a carrier | Steven Trey Tindel, Kim Vellore | 2023-09-12 |
| 11692261 | Evaporator chamber for forming films on substrates | Roey Shaviv, Satish Radhakrishnan | 2023-07-04 |
| 11637004 | Alignment module with a cleaning chamber | Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more | 2023-04-25 |
| 11631813 | Deposition mask and methods of manufacturing and using a deposition mask | Kevin Moraes | 2023-04-18 |
| 11538706 | System and method for aligning a mask with a substrate | Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore, Kevin Moraes +1 more | 2022-12-27 |
| 11505863 | Methods for forming films on substrates | Roey Shaviv, Prashanth Kothnur, Satish Radhakrishnan, Xiaozhou Che | 2022-11-22 |
| D969980 | Deposition chamber showerhead | Graeme Scott, Prashanth Kothnur | 2022-11-15 |
| D967351 | Showerhead reflector | Graeme Scott, Prashanth Kothnur | 2022-10-18 |
| 11414740 | Processing system for forming layers | Roey Shaviv, Michael P. Karazim, Kevin Moraes, Steven V. Sansoni, Andrew J. Constant +4 more | 2022-08-16 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Roey Shaviv, Phillip Stout, Joseph M. Ranish, Prashanth Kothnur, Satish Radhakrishnan | 2022-07-19 |
| 11196360 | System and method for electrostatically chucking a substrate to a carrier | Kim Vellore, Steven Trey Tindel | 2021-12-07 |
| 11195756 | Proximity contact cover ring for plasma dicing | James M. Holden, Ajay Kumar, Aparna Iyer, Alan Ouye | 2021-12-07 |
| 11189516 | Method for mask and substrate alignment | Greg Freeman, Patricia A. Schulze, Ozkan Celik | 2021-11-30 |
| 11183411 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Kim Vellore, Steven Trey Tindel | 2021-11-23 |
| 11158540 | Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process | Wenguang Li, James S. Papanu, Wei-Sheng Lei, Prabhat Kumar, Brad Eaton +1 more | 2021-10-26 |
| 11056277 | Magnetized substrate carrier apparatus with shadow mask for deposition | Daniel Lee Diehl, Roey Shaviv | 2021-07-06 |
| 11047039 | Substrate carrier having hard mask | Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant, Kevin Moraes +4 more | 2021-06-29 |
| 10932323 | Reflector and susceptor assembly for chemical vapor deposition reactor | Brian H. Burrows, Abril Cabreros, David Masayuki Ishikawa, Brian J. Brown | 2021-02-23 |
| 10916464 | Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency | Kim Vellore, Steven Trey Tindel | 2021-02-09 |
| 10692765 | Transfer arm for film frame substrate handling during plasma singulation of wafers | James M. Holden, Ajay Kumar, Brad Eaton, Aparna Iyer | 2020-06-23 |
| 10516700 | Synchronous interface to asynchronous processes | Taras Shkvarchuk, Thomas Nabiel Boulos | 2019-12-24 |
| 10066297 | Tiled showerhead for a semiconductor chemical vapor deposition reactor | Gregg Higashi, Khurshed Sorabji, Lori D. Washington, Andreas Hegedus | 2018-09-04 |