Issued Patents All Time
Showing 51–75 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9070625 | Selective etch chemistry for gate electrode materials | John A. Fitzsimmons, David L. Rath | 2015-06-30 |
| 8927442 | SiCOH hardmask with graded transition layers | Matthew S. Angyal, Yannick Loquet, Yann Mignot, Son V. Nguyen, Hosadurga Shobha | 2015-01-06 |
| 8916337 | Dual hard mask lithography process | John C. Arnold, Sean D. Burns, Steven J. Holmes, David V. Horak, Yunpeng Yin | 2014-12-23 |
| 8859433 | DSA grapho-epitaxy process with etch stop material | Jassem A. Abdallah, Matthew E. Colburn, Steven J. Holmes, Daiji Kawamura, Chi-Chun Liu +1 more | 2014-10-14 |
| 8853076 | Self-aligned contacts | Su Chen Fan, David V. Horak, Shom Ponoth, David L. Rath | 2014-10-07 |
| 8835326 | Titanium-nitride removal | John A. Fitzsimmons, Shyng-Tsong Chen, David L. Rath, Oscar van der Straten | 2014-09-16 |
| 8491987 | Selectively coated self-aligned mask | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta +1 more | 2013-07-23 |
| 8481423 | Methods to mitigate plasma damage in organosilicate dielectrics | John C. Arnold, Griselda Bonilla, William J. Cote, Geraud Jean-Michel Dubois, Daniel C. Edelstein +8 more | 2013-07-09 |
| 8470706 | Methods to mitigate plasma damage in organosilicate dielectrics | John C. Arnold, Griselda Bonilla, William J. Cote, Geraud Jean-Michel Dubois, Daniel C. Edelstein +8 more | 2013-06-25 |
| 8129843 | Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spacer | John C. Arnold, Sampath Purushothaman, Hosadurga Shobha, Terry A. Spooner | 2012-03-06 |
| 8119322 | Method for producing self-aligned mask, articles produced by same and composition for same | Timothy A. Brunner, Matthew E. Colburn, Elbert E. Huang | 2012-02-21 |
| 7948051 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta +1 more | 2011-05-24 |
| 7931829 | Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures | Geraud Jean-Michel Dubois, James L. Hedrick, Ho-Cheol Kim, Victor Yee-Way Lee, Teddie Peregrino Magbitang +3 more | 2011-04-26 |
| 7879717 | Polycarbosilane buried etch stops in interconnect structures | Elbert E. Huang, Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Christy S. Tyberg | 2011-02-01 |
| 7855101 | Layer transfer process and functionally enhanced integrated circuits produced thereby | Bruce K. Furman, Sampath Purushothaman, Anna W. Topol | 2010-12-21 |
| 7830010 | Surface treatment for selective metal cap applications | Chih-Chao Yang, Satya V. Nitta, Sampath Purushothaman | 2010-11-09 |
| 7820242 | Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures | Geraud Jean-Michel Dubois, James L. Hedrick, Ho-Cheol Kim, Victor Yee-Way Lee, Teddie Peregrino Magbitang +3 more | 2010-10-26 |
| 7781332 | Methods to mitigate plasma damage in organosilicate dielectrics using a protective sidewall spacer | John C. Arnold, Sampath Purushothaman, Hosadurga Shobha, Terry A. Spooner | 2010-08-24 |
| 7750479 | Treatment of plasma damaged layer for critical dimension retention, pore sealing and repair | Sampath Purushothaman, Hosadurga Shobha, Terry A. Spooner | 2010-07-06 |
| 7485341 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta +1 more | 2009-02-03 |
| 7459183 | Method of forming low-K interlevel dielectric layers and structures | Geraud Jean-Michel Dubois, James L. Hedrick, Ho-Cheol Kim, Victor Yee-Way Lee, Teddie Peregrino Magbitang +3 more | 2008-12-02 |
| 7396758 | Polycarbosilane buried etch stops in interconnect structures | Elbert E. Huang, Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Christy S. Tyberg | 2008-07-08 |
| 7378738 | Method for producing self-aligned mask, articles produced by same and composition for same | Timothy A. Brunner, Matthew E. Colburn, Elbert E. Huang | 2008-05-27 |
| 7187081 | Polycarbosilane buried etch stops in interconnect structures | Elbert E. Huang, Kaushik A. Kumar, Kelly Malone, Dirk Pfeiffer, Christy S. Tyberg | 2007-03-06 |
| 6911400 | Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Satyanarayana V. Nitta +1 more | 2005-06-28 |