Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7223517 | Lithographic antireflective hardmask compositions and uses thereof | Arpan Mahorowala, David R. Medeiros, Dirk Pfeiffer | 2007-05-29 |
| 7175966 | Water and aqueous base soluble antireflective coating/hardmask materials | Alfred Grill, Arpan Mahorowala, Dirk Pfeiffer | 2007-02-13 |
| 7172849 | Antireflective hardmask and uses thereof | Elbert E. Huang, Arpan Mahorowala, David R. Medeiros, Dirk Pfeiffer, Karen Temple | 2007-02-06 |
| 7098476 | Multilayer interconnect structure containing air gaps and method for making | Roy A. Carruthers, Timothy J. Dalton, Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes +4 more | 2006-08-29 |
| 7077903 | Etch selectivity enhancement for tunable etch resistant anti-reflective layer | Scott D. Halle, David V. Horak, Arpan Mahorowala, Wesley C. Natzle, Dirk Pfeiffer +1 more | 2006-07-18 |
| 7030008 | Techniques for patterning features in semiconductor devices | Scott D. Allen, Steven J. Holmes, Arpan Mahorowala, Dirk Pfeiffer, Richard Wise | 2006-04-18 |
| 6979518 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, S. Jay Chey, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2005-12-27 |
| 6858357 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri, Michael S. Hibbs +1 more | 2005-02-22 |
| 6815329 | Multilayer interconnect structure containing air gaps and method for making | Roy A. Carruthers, Timothy J. Dalton, Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes +4 more | 2004-11-09 |
| 6759321 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2004-07-06 |
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, S. Jay Chey, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-05-04 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Dirk Pfeiffer, Marie Angelopoulos, Phillip Brock, Wu-Song Huang, Arpan Mahorowala +2 more | 2004-05-04 |
| 6686124 | Multifunctional polymeric materials and use thereof | Marie Angelopoulos, David R. Medeiros, Wayne M. Moreau | 2004-02-03 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, S. Jay Chey, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-01-27 |
| 6653027 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri, Michael S. Hibbs +1 more | 2003-11-25 |
| 6617086 | Forming a pattern of a negative photoresist | Marie Angelopoulos, Edward D. Babich, Inna V. Babich, James J. Bucchignano, Karen E. Petrillo +1 more | 2003-09-09 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Alfred Grill, Scott D. Halle, Arpan Mahorowala, Vishnubhai V. Patel | 2003-02-04 |
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2002-09-10 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Alessandro C. Callegari, Julien Fontaine, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel | 2002-08-06 |
| 6316167 | Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof | Marie Angelopoulos, Alfred Grill, Scott D. Halle, Arpan Mahorowala, Vishnubhai V. Patel | 2001-11-13 |
| 6251569 | Forming a pattern of a negative photoresist | Marie Angelopoulos, Edward D. Babich, Inna V. Babich, James J. Bucchignano, Karen E. Petrillo +1 more | 2001-06-26 |