Issued Patents All Time
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8637412 | Process to form an adhesion layer and multiphase ultra-low k dielectric material using PECVD | Alfred Grill, Thomas J. Haigh, Jr., Kelly Malone, Son V. Nguyen, Hosadurga Shobha | 2014-01-28 |
| 8618183 | Materials containing voids with void size controlled on the nanometer scale | Stephen M. Gates, Alfred Grill, Deborah A. Neumayer, Son V. Nguyen | 2013-12-31 |
| 8268411 | Materials containing voids with void size controlled on the nanometer scale | Stephen M. Gates, Alfred Grill, Deborah A. Neumayer, Son V. Nguyen | 2012-09-18 |
| 7888741 | Structures with improved interfacial strength of SiCOH dielectrics and method for preparing the same | Daniel C. Edelstein, Alfred Grill, Darryl D. Restaino | 2011-02-15 |
| 7674521 | Materials containing voids with void size controlled on the nanometer scale | Stephen M. Gates, Alfred Grill, Deborah A. Neumayer, Son V. Nguyen | 2010-03-09 |
| 7312524 | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made | Stephen M. Gates, Alfred Grill, David R. Medeiros, Deborah Newmayer, Son V. Nguyen +1 more | 2007-12-25 |
| 7252875 | Diffusion barrier with low dielectric constant and semiconductor device containing same | Stephan A. Cohen, Stephen M. Gates, Alfred Grill | 2007-08-07 |
| 7067437 | Structures with improved interfacial strength of SiCOH dielectrics and method for preparing the same | Daniel C. Edelstein, Alfred Grill, Darryl D. Restaino | 2006-06-27 |
| 7049247 | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made | Stephen M. Gates, Alfred Grill, David R. Medeiros, Deborah A. Neumayer, Son V. Nguyen +1 more | 2006-05-23 |
| 6972440 | Enhanced T-gate structure for modulation doped field effect transistors | Dinkar Singh, Katherine L. Saenger, Alfred Grill, Steven J. Koester | 2005-12-06 |
| 6953984 | Hydrogenated oxidized silicon carbon material | Alfred Grill, Christopher V. Jahnes, Laurent Perraud | 2005-10-11 |
| 6790789 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made | Alfred Grill | 2004-09-14 |
| 6770573 | Method for fabricating an ultralow dielectric constant material | Alfred Grill | 2004-08-03 |
| 6768200 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device | Alfred Grill | 2004-07-27 |
| 6764774 | Structures with improved adhesion to Si and C containing dielectrics and method for preparing the same | Alfred Grill, Michael Lane | 2004-07-20 |
| 6759321 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes +2 more | 2004-07-06 |
| 6756323 | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device | Alfred Grill | 2004-06-29 |
| 6740535 | Enhanced T-gate structure for modulation doped field effect transistors | Dinkar Singh, Katherine L. Saenger, Alfred Grill, Steven J. Koester | 2004-05-25 |
| 6724086 | Hydrogenated oxidized silicon carbon material | Alfred Grill, Christopher V. Jahnes, Laurent Perraud | 2004-04-20 |
| 6541398 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | Alfred Grill, David R. Medeiros | 2003-04-01 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Katherina Babich, Alfred Grill, Scott D. Halle, Arpan Mahorowala | 2003-02-04 |
| 6497963 | Hydrogenated oxidized silicon carbon material | Alfred Grill, Christopher V. Jahnes, Laurent Perraud | 2002-12-24 |
| 6479110 | Multiphase low dielectric constant material and method of deposition | Alfred Grill, Stephen M. Gates | 2002-11-12 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | Alfred Grill, John P. Hummel, Christopher V. Jahnes, Katherine L. Saenger | 2002-09-10 |
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes +2 more | 2002-09-10 |