Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759655 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi +1 more | 2004-07-06 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada | 2004-06-22 |
| 6635873 | Scanning electron microscope with voltage applied to the sample | Hideo Todokoro, Makoto Ezumi | 2003-10-21 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Mikio Ichihashi +6 more | 2003-01-28 |
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Atsuko Takafuji, Shuji Sugiyama | 2003-01-21 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi | 2003-01-07 |
| 6493082 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi +2 more | 2002-12-10 |
| 6480279 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi | 2002-11-12 |
| 6476913 | Inspection method, apparatus and system for circuit pattern | Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi, Maki Ito | 2002-11-05 |
| 6452178 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Mikio Ichihashi +6 more | 2002-09-17 |
| 6421122 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi +2 more | 2002-07-16 |
| 6388747 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi | 2002-05-14 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |
| 6348690 | Method and an apparatus of an inspection system using an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Mikio Ichihashi +6 more | 2002-02-19 |
| 6333510 | Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada | 2001-12-25 |
| 6329826 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-12-11 |
| 6310341 | Projecting type charged particle microscope and projecting type substrate inspection system | Hideo Todokoro, Tohru Ishitani, Shunroku Taya, Hiroyuki Shinada, Taku Ninomiya +1 more | 2001-10-30 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2001-05-22 |
| 6172363 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2001-01-09 |
| 6107637 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada | 2000-08-22 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2000-07-11 |
| 5478195 | Process and apparatus for transferring an object and for processing semiconductor wafers | — | 1995-12-26 |