Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6618692 | Remote diagnostic system and method for semiconductor manufacturing equipment | Nobuo Tsumaki, Hideyuki Yamamoto | 2003-09-09 |
| 6610171 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6610170 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-08-26 |
| 6596551 | Etching end point judging method, etching end point judging device, and insulating film etching method using these methods | Tatehito Usui, Ken Yoshioka, Shoji Ikuhara, Kouji Nishihata, Tetsunori Kaji +1 more | 2003-07-22 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6544379 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-04-08 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Mitsuru Suehiro, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6524428 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2003-02-25 |
| 6506686 | Plasma processing apparatus and plasma processing method | Toshio Masuda, Ryoji Fukuyama, Tomoyuki Tamura | 2003-01-14 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Tatehito Usui, Shigeru Shirayone, Mitsuru Suehiro | 2003-01-07 |
| 6482747 | Plasma treatment method and plasma treatment apparatus | Saburo Kanai, Yoshiaki Satou, Takazumi Ishizu | 2002-11-19 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Ken Yoshioka, Saburou Kanai | 2002-07-02 |
| 6336991 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2002-01-08 |
| 6235146 | Vacuum treatment system and its stage | Masanori Kadotani, Saburo Kanai, Youichi Itou, Takashi Fujii, Hironobu Kawahara +2 more | 2001-05-22 |
| 6221201 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2001-04-24 |
| 6217705 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshitumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2001-04-17 |
| 6186153 | Plasma treatment method and manufacturing method of semiconductor device | Hiroyuki Kitsunai, Nobuo Tsumaki, Shigeru Kakuta, Kazuo Nojiri | 2001-02-13 |
| 6171438 | Plasma processing apparatus and plasma processing method | Toshio Masuda, Mitsuru Suehiro, Tetsunori Kaji, Saburo Kanai | 2001-01-09 |
| 6048434 | Substrate holding system including an electrostatic chuck | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 2000-04-11 |
| 5985035 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-11-16 |
| 5961774 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-10-05 |
| 5906684 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1999-05-25 |
| 5895586 | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum | Tetsunori Kaji, Saburo Kanai, Satoshi Ito, Ryoji Hamasaki, Tetsuo Ono +2 more | 1999-04-20 |
| 5874012 | Plasma processing apparatus and plasma processing method | Saburo Kanai, Kouichi Okamura, Ryoji Hamasaki, Satoshi Ito | 1999-02-23 |
| 5792304 | Method of holding substrate and substrate holding system | Naoyuki Tamura, Youichi Ito, Yoshifumi Ogawa, Hiroyuki Shichida, Tsunehiko Tsubone | 1998-08-11 |