Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5781400 | Electrostatically attracting electrode and a method of manufacture thereof | Youichi Itou, Saburo Kanai, Seiichiro Kanno | 1998-07-14 |
| 5697751 | Wafer transfer apparatus and method | — | 1997-12-16 |
| 5556204 | Method and apparatus for detecting the temperature of a sample | Naoyuki Tamura, Manabu Edamura | 1996-09-17 |
| 5536359 | Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber | Hiroki Kawada, Manabu Edamura, Saburo Kanai, Naoyuki Tamura | 1996-07-16 |
| 5442183 | Charged particle beam apparatus including means for maintaining a vacuum seal | Hironobu Matsui, Mikio Ichihashi, Shinjiroo Ueda, Tadashi Otaka, Toshiaki Kobari +1 more | 1995-08-15 |
| 5259735 | Evacuation system and method therefor | Shinjiro Ueda, Manabu Edamura, Naoyuki Tamura, Kazuaki Ichihashi | 1993-11-09 |
| 5254856 | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems | Hironobu Matsui, Mikio Ichihashi, Shinjiroo Ueda, Tadashi Otaka, Toshiaki Kobari +1 more | 1993-10-19 |
| 4511269 | Cancel type printing head | Kenzi Okuna, Isao Nakajima, Mineo Harada, Yutaka Kako | 1985-04-16 |
| 4392423 | Printing hammer driving apparatus | Isao Nakajima, Koji Tagusari, Kenji Okuna, Toru Hayama, Michihiro Watanabe +1 more | 1983-07-12 |