Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481266 | Multi-range three-dimensional imaging systems | Jun Pei, June Ye | 2019-11-19 |
| 10460905 | Backscattered electrons (BSE) imaging using multi-beam tools | Richard R. Simmons, Doug K. Masnaghetti, Rainer Knippelmeyer | 2019-10-29 |
| 10451740 | Scanning lidar systems for three-dimensional sensing | Jun Pei, Jun Ye | 2019-10-22 |
| 10366862 | Method and system for noise mitigation in a multi-beam scanning electron microscopy system | Doug K. Masnaghetti, Richard R. Simmons, Rainer Knippelmeyer | 2019-07-30 |
| 10325753 | Method and system for focus adjustment of a multi-beam scanning electron microscopy system | Doug K. Masnaghetti, Richard R. Simmons, Scott A. Young, Rainer Knippelmeyer | 2019-06-18 |
| 10192716 | Multi-beam dark field imaging | Doug K. Masnaghetti, Richard R. Simmons, Rainer Knippelmeyer | 2019-01-29 |
| 9874597 | Light-emitting device test systems | Alan D. Brodie, James George, Yu Guan, Ralph Nyffenegger | 2018-01-23 |
| 9666411 | Virtual ground for target substrate using floodgun and feedback control | Gabor Toth | 2017-05-30 |
| 9529279 | Method and apparatus for inspecting a substrate | David L. Adler, Kirk J. Bertsche, Stuart L. Friedman | 2016-12-27 |
| 9366524 | Alignment sensor and height sensor | Joseph A. DiRegolo | 2016-06-14 |
| 9347824 | Light collection optics for measuring flux and spectrum from light-emitting devices | Joseph A. DiRegolo, Michael Robert Gluszczak | 2016-05-24 |
| 9170503 | Method and apparatus for inspecting a substrate | David L. Adler, Kirk J. Bertsche, Stuart L. Friedman | 2015-10-27 |
| 9165742 | Inspection site preparation | Richard R. Simmons, Douglas K. Masnaghetti, Fred E. Stanke, Scott A. Young, Christopher Sears | 2015-10-20 |
| 8957394 | Compact high-voltage electron gun | Alan D. Brodie, Joseph Maurino, Paul F. Petric | 2015-02-17 |
| 8642981 | Electron microscope assembly for viewing the wafer plane image of an electron beam lithography tool | Paul F. Petric, Michael D. Madsen, Alan D. Brodie | 2014-02-04 |
| 8614427 | Suspended membrane calibration sample | Liqun Han | 2013-12-24 |
| 8373144 | Quasi-annular reflective electron patterning device | Paul F. Petric, Allen M. Carroll | 2013-02-12 |
| 8253119 | Well-based dynamic pattern generator | Alan D. Brodie, Paul F. Petric | 2012-08-28 |
| 8204296 | Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer | Kris Bhaskar, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer +1 more | 2012-06-19 |
| 8194968 | Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions | Allen Park, Peter Rose, Ellis Chang, Brian Duffy, Gordon Abbott | 2012-06-05 |
| 8106355 | Automated inspection using cell-cell subtraction perpendicular to stage motion direction | Jan Lauber | 2012-01-31 |
| 8089051 | Electron reflector with multiple reflective modes | Luca Grella, Regina Freed | 2012-01-03 |
| 7796804 | Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer | Kris Bhaskar, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer +1 more | 2010-09-14 |
| 7714300 | High-speed high-efficiency solid-state electron detector | Tom Miller, David L. Brown | 2010-05-11 |
| 7710556 | Inspection system | — | 2010-05-04 |