Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7660687 | Robust measurement of parameters | Indranil De, David L. Adler | 2010-02-09 |
| 7514681 | Electrical process monitoring using mirror-mode electron microscopy | Paul Frank Marella, Marian Mankos, David L. Adler | 2009-04-07 |
| 7507959 | Method for charging substrate to a potential | Kirk J. Bertsche | 2009-03-24 |
| 7465922 | Accelerating electrostatic lens gun for high-speed electron beam inspection | — | 2008-12-16 |
| 7446320 | Electronically-variable immersion electrostatic lens | Kirk J. Bertsche, Francisco Machuca | 2008-11-04 |
| 7315022 | High-speed electron beam inspection | David L. Adler, Mehdi Vaez-Iravani, Liqun Han, Kirk J. Bertsche | 2008-01-01 |
| 7176468 | Method for charging substrate to a potential | Kirk J. Bertsche | 2007-02-13 |
| 7171038 | Method and apparatus for inspecting a substrate | David L. Adler, Kirk J. Bertsche, Stuart L. Friedman | 2007-01-30 |
| 7091486 | Method and apparatus for beam current fluctuation correction | Alan D. Brodie | 2006-08-15 |
| 6828571 | Apparatus and methods of controlling surface charge and focus | Jan Lauber, Paul F. Petric, Ross W. Thompson, Jason Lim, Frank Fan +1 more | 2004-12-07 |
| 6774646 | Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms | Liqun Han | 2004-08-10 |
| 6664546 | In-situ probe for optimizing electron beam inspection and metrology based on surface potential | Jan Lauber, Jun Pei, Jorge Pablo Fernandez | 2003-12-16 |
| 6627884 | Simultaneous flooding and inspection for charge control in an electron beam inspection machine | David J. Walker, Jun Pei, Neil Richardson | 2003-09-30 |
| 6597006 | Dual beam symmetric height systems and methods | Jun Pei | 2003-07-22 |
| 6586736 | Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample | — | 2003-07-01 |
| 6342156 | Multi-segment continuous filtration system | Danny Sanders, Richard C. Andrew, Kenneth Boldery, David L. Mullins, Robert Coyle | 2002-01-29 |
| 6064486 | Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals | Xun Chen, Amir A. Ghazanfarian, R. Fabian W. Pease, Thomas Kailath | 2000-05-16 |
| 5932966 | Electron sources utilizing patterned negative electron affinity photocathodes | James E. Schneider, Kenneth Costello, R. Fabian W. Pease, Aaron W. Baum | 1999-08-03 |
| 5150392 | X-ray mask containing a cantilevered tip for gap control and alignment | Fritz J. Hohn | 1992-09-22 |
| 4992728 | Electrical probe incorporating scanning proximity microscope | Leonard Berenbaum | 1991-02-12 |
| 4925139 | Mechanical stage support for a scanning tunneling microscope | — | 1990-05-15 |