Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6064486 | Systems, methods and computer program products for detecting the position of a new alignment mark on a substrate based on fitting to sample alignment signals | Xun Chen, Mark A. McCord, R. Fabian W. Pease, Thomas Kailath | 2000-05-16 |