Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793938 | Intermediate-frequency analogue-to-digital conversion device | Yajuan Duan, Mengbi Lei, Xiangling Li, Guojun Zhang | 2017-10-17 |
| 9012336 | Method for conformal treatment of dielectric films using inductively coupled plasma | Heng Pan, Matthew S. Rogers, Johanes F. Swenberg, Christopher S. Olsen, David Chu +1 more | 2015-04-21 |
| 8999106 | Apparatus and method for controlling edge performance in an inductively coupled plasma chamber | Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis, Philip A. Bottini +1 more | 2015-04-07 |
| 8871645 | Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof | Udayan Ganguly, Yoshita Yokota, Jing Tang, Sunderraj Thirupapuliyur, Christopher S. Olsen +6 more | 2014-10-28 |
| 8722547 | Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries | Radhika Mani, Nicolas Gani, Meihua Shen, Shashank Deshmukh | 2014-05-13 |
| 8546273 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Son T. Nguyen, Jose Antonio Marin, Jian Li | 2013-10-01 |
| 8501626 | Methods for high temperature etching a high-K material gate structure | Eiichi Matsusue, Meihua Shen, Shashank Deshmukh, Anh Phan, David Palagashvili +4 more | 2013-08-06 |
| 8481433 | Methods and apparatus for forming nitrogen-containing layers | Malcolm J. Bevan, Johanes F. Swenberg, Son T. Nguyen, Jose Antonio Marin, Jian Li | 2013-07-09 |
| 8137463 | Dual zone gas injection nozzle | Johanes S. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis, Philip A. Bottini | 2012-03-20 |
| 8062472 | Method of correcting baseline skew by a novel motorized source coil assembly | Johanes F. Swenberg, Hanh Nguyen, Son T. Nguyen, Roger Curtis, Philip A. Bottini | 2011-11-22 |
| 7964512 | Method for etching high dielectric constant materials | Xikun Wang, Yan Du, Mei Shen | 2011-06-21 |
| 7780862 | Device and method for etching flash memory gate stacks comprising high-k dielectric | Meihua Shen, Xikun Wang, Yan Du, Shashank Deshmukh | 2010-08-24 |
| 7718081 | Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes | Jim Zhongyi He, Sang-Hoon Ahn, Meihua Shen, Hichem M'Saad, Wendy H. Yeh +1 more | 2010-05-18 |
| 7605398 | Apparatus of high dynamic-range CMOS image sensor and method thereof | Oscal Tzyh-Chiang Chen, Hsiu-Fen Yeh | 2009-10-20 |
| 7568276 | Apparatus for producing an inductor | Shitong Yang, Jianxiong Lin, Yanliang Li | 2009-08-04 |
| 7498106 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Hiroki Sasano | 2009-03-03 |
| 7482178 | Chamber stability monitoring using an integrated metrology tool | David Mui, Hiroki Sasano | 2009-01-27 |
| 7368394 | Etch methods to form anisotropic features for high aspect ratio applications | Meihua Shen, Uwe Leucke, Guangxiang Jin, Xikun Wang, Scott Williams | 2008-05-06 |
| 7262865 | Method and apparatus for controlling a calibration cycle or a metrology tool | David Mui, Hiroki Sasano | 2007-08-28 |
| 7250373 | Method and apparatus for etching material layers with high uniformity of a lateral etch rate across a substrate | David Mui | 2007-07-31 |
| 7250319 | Method of fabricating quantum features | Lawrence C. West | 2007-07-31 |
| 7094613 | Method for controlling accuracy and repeatability of an etch process | David Mui, Hiroki Sasano | 2006-08-22 |
| 7064078 | Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme | Jim Zhongyi He, Sang-Hoon Ahn, Meihua Shen, Hichem M'Saad, Wendy H. Yeh +1 more | 2006-06-20 |
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Hiroki Sasano | 2005-11-01 |
| 6924191 | Method for fabricating a gate structure of a field effect transistor | Thorsten Lill, David Mui, Christopher Dennis Bencher | 2005-08-02 |