Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11877260 | Method for management node to page terminal device, and management node for use in wireless communication network | Lei Xia | 2024-01-16 |
| 7964512 | Method for etching high dielectric constant materials | Xikun Wang, Wei Liu, Mei Shen | 2011-06-21 |
| 7780862 | Device and method for etching flash memory gate stacks comprising high-k dielectric | Meihua Shen, Xikun Wang, Wei Liu, Shashank Deshmukh | 2010-08-24 |
| 7504338 | Method of pattern etching a silicon-containing hard mask | Meihua Shen, Shashank Deshmukh | 2009-03-17 |
| 6933243 | High selectivity and residue free process for metal on thin dielectric gate etch application | Meihua Shen, Nicolas Gani, Oranna Yauw, Hakeem Oluseyi | 2005-08-23 |