Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933243 | High selectivity and residue free process for metal on thin dielectric gate etch application | Meihua Shen, Yan Du, Nicolas Gani, Hakeem Oluseyi | 2005-08-23 |
| 6797188 | Self-cleaning process for etching silicon-containing material | Meihua Shen, Wei-Nan Jiang, Jeffrey D. Chinn | 2004-09-28 |
| 6599437 | Method of etching organic antireflection coating (ARC) layers | Meihua Shen, Nicolas Gani, Jeffrey D. Chinn | 2003-07-29 |
| 6551941 | Method of forming a notched silicon-containing gate structure | Chan Syun David Yang, Meihua Shen, Jeffrey D. Chinn | 2003-04-22 |