Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133817 | Shallow trench isolation etch process | Meihua Shen, Radhika Mani, Sunil Srinivasan, Daehee Weon, Nicolas Gani +2 more | 2012-03-13 |
| 7498106 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Wei Liu | 2009-03-03 |
| 7482178 | Chamber stability monitoring using an integrated metrology tool | David Mui, Wei Liu | 2009-01-27 |
| 7262865 | Method and apparatus for controlling a calibration cycle or a metrology tool | David Mui, Wei Liu | 2007-08-28 |
| 7094613 | Method for controlling accuracy and repeatability of an etch process | David Mui, Wei Liu | 2006-08-22 |
| 6960416 | Method and apparatus for controlling etch processes during fabrication of semiconductor devices | David Mui, Wei Liu | 2005-11-01 |
| 6924088 | Method and system for realtime CD microloading control | David Mui, Wei Liu, Shashank Deshmukh | 2005-08-02 |
| 6858361 | Methodology for repeatable post etch CD in a production tool | David Mui, Wei Liu | 2005-02-22 |