Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Dean C. Hruzek, Nir Merry | 2022-02-08 |
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2021-11-30 |
| 11177136 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2021-11-16 |
| 11171008 | Abatement and strip process chamber in a dual load lock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2021-11-09 |
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Luke Bonecutter, Douglas B. Baumgarten | 2021-11-09 |
| 11081379 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2021-08-03 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Dean C. Hruzek, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti, Babu Chinnasamy +1 more | 2021-07-13 |
| 10946406 | Metering apparatus | Martin Reuter | 2021-03-16 |
| 10943788 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Andrew Nguyen, Jared Ahmad Lee | 2021-03-09 |
| 10832928 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, David Blahnik | 2020-11-10 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2020-09-01 |
| 10566205 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Andrew Nguyen, Jared Ahmad Lee | 2020-02-18 |
| 10541165 | Systems, apparatus, and methods for an improved load port backplane | Douglas B. Baumgarten | 2020-01-21 |
| 10468282 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeff Salinas, Imad Yousif, Aniruddha Pal | 2019-11-05 |
| 10453694 | Abatement and strip process chamber in a dual loadlock configuration | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2019-10-22 |
| 10453726 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Luke Bonecutter, Douglas B. Baumgarten | 2019-10-22 |
| 10446428 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2019-10-15 |
| 10381247 | Gas systems and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Angela Rose Sico, Michael Kuchar +2 more | 2019-08-13 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Izya Kremerman, Jeffrey C. Hudgens +1 more | 2019-05-07 |
| 10276354 | Segmented focus ring assembly | Jared Ahmad Lee | 2019-04-30 |
| 10262884 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, David Blahnik | 2019-04-16 |
| 10204805 | Thin heated substrate support | Imad Yousif, Martin Jeffrey Salinas, Aniruddha Pal, Jared Ahmad Lee | 2019-02-12 |
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2018-10-02 |
| 10056274 | System and method for forming a sealed chamber | Michael R. Rice, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz) +3 more | 2018-08-21 |
| 9587749 | Slit valve with a pressurized gas bearing | Michael R. Rice, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel +2 more | 2017-03-07 |