Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524889 | Processing systems and apparatus adapted to process substrates in electronic device manufacturing | Steve Hongkham, Eric A. Englhardt, Ganesh Balasubramanian, Xinglong Chen, JuanCarlos Rocha-Alvarez | 2016-12-20 |
| 9464732 | Apparatus for uniform pumping within a substrate process chamber | Martin Jeffrey Salinas, Jared Ahmad Lee, Imad Yousif | 2016-10-11 |
| 9435025 | Gas apparatus, systems, and methods for chamber ports | Nagendra Madiwal, Robert Irwin Decottignies, Andrew Nguyen, Angela Rose Sico, Michael Kuchar +2 more | 2016-09-06 |
| 9355876 | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations | Ganesh Balasubramanian, JuanCarlos Rocha-Alvarez, Jeffrey Barrett Robinson, Dale R. Du Bois, Paul Connors | 2016-05-31 |