Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8662957 | Leak proof pad for CMP endpoint detection | Young J. Paik, Christopher R. Mahon, Ashish Bhatnagar | 2014-03-04 |
| 8475231 | Carrier head membrane | Young J. Paik, Ashish Bhatnagar | 2013-07-02 |
| 8464594 | Measuring flow properties of multiple gas nozzles of a gas distributor | Ashish Bhatnagar, Daniel L. Martin, Robert T. Hirahara, Gangadhar Sheelavant | 2013-06-18 |
| 8225927 | Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity | Ashish Bhatnagar | 2012-07-24 |
| 6913670 | Substrate support having barrier capable of detecting fluid leakage | Michael Douglas, Surinder Bedi | 2005-07-05 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |
| 6581275 | Fabricating an electrostatic chuck having plasma resistant gas conduits | Shamouil Shamouilian, Dennis S. Grimard | 2003-06-24 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2002-12-03 |
| 6490144 | Support for supporting a substrate in a process chamber | Syed H. Askari, Dennis S. Grimard, Surinder Bedi, Ananda H. Kumar, Shamouil Shamouilian | 2002-12-03 |
| 6481886 | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system | Liang Wang, Shamouil Shamouilian, Paul Luscher, Hamid Noorbakhsh | 2002-11-19 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more | 2002-10-08 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Eric Askarinam, Edwin C. Weldon, Michael R. Rice +1 more | 2002-08-27 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6370006 | Electrostatic chuck having a plurality of gas inlet channels | Ananda H. Kumar, Shamouil Shamouilian | 2002-04-09 |
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser +4 more | 2001-10-30 |
| 6280584 | Compliant bond structure for joining ceramic to metal | Ananda H. Kumar, Shamouil Shamouilian | 2001-08-28 |
| 6220607 | Thermally conductive conformal media | Gerhard Schneider, Edwin C. Weldon, Ananda H. Kumar | 2001-04-24 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2000-08-22 |
| 5700327 | Method for cleaning hollow articles with plasma | Robert J. Babacz, Kevin Frake, Melissa A. Baylog | 1997-12-23 |