Issued Patents All Time
Showing 26–50 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580620 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-03-03 |
| 10546728 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-01-28 |
| 10535502 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-01-14 |
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Kallol Bera, Michael R. Rice +1 more | 2019-12-17 |
| 10475626 | Ion-ion plasma atomic layer etch process and reactor | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Leonid Dorf, Yang Yang | 2019-11-12 |
| 10453656 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2019-10-22 |
| 10418225 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman | 2019-09-17 |
| 10373807 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman | 2019-08-06 |
| 10312056 | Distributed electrode array for plasma processing | Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman | 2019-06-04 |
| 10249495 | Diamond like carbon layer formed by an electron beam plasma process | Yang Yang, Lucy Chen, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins +5 more | 2019-04-02 |
| 10249470 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | Jason A. Kenney, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2019-04-02 |
| 10242847 | Plasma processing apparatus and liner assembly for tuning electrical skews | Zhigang Chen, Shahid Rauf, Kenneth S. Collins | 2019-03-26 |
| 10170279 | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding | Jason A. Kenney, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2019-01-01 |
| 10131994 | Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Douglas A. Buchberger, Jr. +5 more | 2018-11-20 |
| 9928987 | Inductively coupled plasma source with symmetrical RF feed | Jason A. Kenney, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2018-03-27 |
| 9896769 | Inductively coupled plasma source with multiple dielectric windows and window-supporting structure | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Douglas A. Buchberger, Jr. +5 more | 2018-02-20 |
| 9870897 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | Kenneth S. Collins, Richard Fovell, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2018-01-16 |
| 9824862 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more | 2017-11-21 |
| 9799491 | Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching | Leonid Dorf, Kenneth S. Collins, Shahid Rauf, Kartik Ramaswamy, Hamid Tavassoli +2 more | 2017-10-24 |
| 9745663 | Symmetrical inductively coupled plasma source with symmetrical flow chamber | Andrew Nguyen, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Douglas A. Buchberger, Jr. +5 more | 2017-08-29 |
| 9741546 | Symmetric plasma process chamber | Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2017-08-22 |
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Nipun Misra +2 more | 2017-08-01 |
| 9653267 | Temperature controlled chamber liner | Kallol Bera, Nipun Misra, Larry D. Elizaga | 2017-05-16 |
| 9570275 | Heated showerhead assembly | Olga Regelman, Kallol Bera, Douglas A. Buchberger, Jr., Paul Brillhart | 2017-02-14 |
| 9540731 | Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads | Hamid Noorbakhsh | 2017-01-10 |