Issued Patents All Time
Showing 51–75 of 256 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422513 | Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition | Melissa K. Rath, David Bernhard, David W. Minsek | 2016-08-23 |
| 9340878 | TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same | Jose I. Arno, Joseph R. Despres, Shkelqim Letaj, Steven M. Lurcott, Peng Zou | 2016-05-17 |
| 9256134 | Photoresist removal | David W. Minsek, Melissa K. Rath, David Bernhard | 2016-02-09 |
| 9219232 | Antimony and germanium complexes useful for CVD/ALD of metal thin films | William Hunks, Tianniu Chen, Chongying Xu, Jeffrey F. Roeder, Matthias Stender +3 more | 2015-12-22 |
| 9134146 | Fluid monitoring apparatus | Ing-Shin Chen, Richard Chism | 2015-09-15 |
| 9109755 | Endpoint determination for capillary-assisted flow control | Joseph D. Sweeney, Anthony M. Avila, Michael J. Wodjenski, Joseph R. Despres | 2015-08-18 |
| 9102693 | Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films | Ziyun Wang, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Tianniu Chen | 2015-08-11 |
| 9038855 | Fluid processing systems and methods | Steven M. Lurcott, John E. Q. Hughes, Peter Wrschka, Donald D. Ware, Peng Zou | 2015-05-26 |
| 8951948 | Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition | Melissa K. Rath, David Bernhard, David W. Minsek | 2015-02-10 |
| 8882889 | Recovery of Xe and other high value compounds | J. Donald Carruthers, Richard Fricke, Joshua B. Sweeney, James V. McManus, Edward A. Sturm | 2014-11-11 |
| 8877549 | Low temperature deposition of phase change memory materials | Jeffrey F. Roeder, Bryan C. Hendrix, Gregory T. Stauf, Chongying Xu, William Hunks +2 more | 2014-11-04 |
| 8802882 | Composition and method for low temperature chemical vapor deposition of silicon-containing films including silicon carbonitride and silicon oxycarbonitride films | Ziyun Wang, Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder, Tianniu Chen | 2014-08-12 |
| 8796068 | Tellurium compounds useful for deposition of tellurium containing materials | Matthias Stender, Chongying Xu, Tianniu Chen, William Hunks, Philip S. H. Chen +1 more | 2014-08-05 |
| 8784936 | Precursor compositions for atomic layer deposition and chemical vapor deposition of titanate, lanthanate, and tantalate dielectric films | Chongying Xu, Tianniu Chen, Thomas M. Cameron, Jeffrey F. Roeder | 2014-07-22 |
| 8709863 | Antimony and germanium complexes useful for CVD/ALD of metal thin films | William Hunks, Tianniu Chen, Chongying Xu, Jeffrey F. Roeder, Matthias Stender +3 more | 2014-04-29 |
| 8679894 | Low temperature deposition of phase change memory materials | Jeffrey F. Roeder, Bryan C. Hendrix, Gregory T. Stauf, Chongying Xu, William Hunks +2 more | 2014-03-25 |
| 8679734 | Photoresist removal | David W. Minsek, Melissa K. Rath, David Bernhard | 2014-03-25 |
| 8541318 | Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the same | Ziyun Wang, Chongying Xu | 2013-09-24 |
| 8501976 | Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material | — | 2013-08-06 |
| 8338087 | Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate | Melissa K. Rath, David Bernhard, David W. Minsek, Michael B. Korzenski | 2012-12-25 |
| 8299286 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Douglas Gordon, Timothy E. Glassman, Sofia Pombrik, Brian A. Vaartstra +1 more | 2012-10-30 |
| 8288198 | Low temperature deposition of phase change memory materials | Jeffrey F. Roeder, Bryan C. Hendrix, Gregory T. Stauf, Chongying Xu, William Hunks +2 more | 2012-10-16 |
| 8268665 | Antimony and germanium complexes useful for CVD/ALD of metal thin films | William Hunks, Tianniu Chen, Chongying Xu, Jeffrey F. Roeder, Matthias Stender +3 more | 2012-09-18 |
| 8242032 | Monosilane or disilane derivatives and method for low temperature deposition of silicon-containing films using the same | Ziyun Wang, Chongying Xu | 2012-08-14 |
| 8241704 | Chemical vapor deposition of high conductivity, adherent thin films of ruthenium | Bryan C. Hendrix, James Welch, Steven M. Bilodeau, Jeffrey F. Roeder, Chongying Xu | 2012-08-14 |