Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8299286 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman, Brian A. Vaartstra +1 more | 2012-10-30 |
| 6162712 | Platinum source compositions for chemical vapor deposition of platinum | Thomas H. Baum, Peter S. Kirlin | 2000-12-19 |
| 6110529 | Method of forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more | 2000-08-29 |
| 5820664 | Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same | Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more | 1998-10-13 |
| 5783716 | Platinum source compositions for chemical vapor deposition of platinum | Thomas H. Baum, Peter S. Kirlin | 1998-07-21 |