| 8299286 |
Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition |
Robin A. Gardiner, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman, Brian A. Vaartstra +1 more |
2012-10-30 |
| 6162712 |
Platinum source compositions for chemical vapor deposition of platinum |
Thomas H. Baum, Peter S. Kirlin |
2000-12-19 |
| 6110529 |
Method of forming metal films on a substrate by chemical vapor deposition |
Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more |
2000-08-29 |
| 5820664 |
Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same |
Robin A. Gardiner, Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman +1 more |
1998-10-13 |
| 5783716 |
Platinum source compositions for chemical vapor deposition of platinum |
Thomas H. Baum, Peter S. Kirlin |
1998-07-21 |