Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422513 | Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition | David Bernhard, Thomas H. Baum, David W. Minsek | 2016-08-23 |
| 9256134 | Photoresist removal | David W. Minsek, David Bernhard, Thomas H. Baum | 2016-02-09 |
| 8951948 | Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition | David Bernhard, Thomas H. Baum, David W. Minsek | 2015-02-10 |
| 8679734 | Photoresist removal | David W. Minsek, David Bernhard, Thomas H. Baum | 2014-03-25 |
| 8338087 | Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate | David Bernhard, David W. Minsek, Michael B. Korzenski, Thomas H. Baum | 2012-12-25 |
| 8058219 | Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant | David Bernhard, Thomas H. Baum, Ping Jiang, Renjie Zhou, Michael B. Korzenski | 2011-11-15 |
| 7994108 | Composition useful for removal of post-etch photoresist and bottom anti-reflection coatings | David W. Minsek, Weihua Wang, David Bernhard, Thomas H. Baum | 2011-08-09 |