Issued Patents 2024
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua | 2024-11-12 |
| 12142458 | Symmetric plasma source to generate pie-shaped treatment | Anantha K. Subramani, Farzad Houshmand, Abhishek Chowdhury, John C. Forster, Kallol Bera | 2024-11-12 |
| 12119221 | PEALD nitride films | Hanhong Chen, Joseph AuBuchon | 2024-10-15 |
| 12114083 | Smart camera substrate | Upendra Ummethala, Keith R. Berding, Blake Erickson, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12094707 | Plasma enhanced CVD with periodic high voltage bias | Kelvin Chan, Travis Koh, Simon Huang | 2024-09-17 |
| 12033835 | Modular microwave source with multiple metal housings | Robert B. Moore, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 12012652 | Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination | Kelvin Chan, Yang Guo, Ashish Goel, Anantha K. Subramani | 2024-06-18 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun +5 more | 2024-06-11 |
| 12002654 | Modular high-frequency source | Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Kallol Bera | 2024-06-04 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Kelvin Chan, Amir Bayati +2 more | 2024-04-16 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Hanhong Chen, Kelvin Chan, Thai Cheng Chua | 2024-04-09 |
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa +5 more | 2024-04-02 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2024-01-23 |
| 11874189 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | Chuang-Chia Lin, David Peterson, Amir Bayati | 2024-01-16 |