Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033881 | Reduced localized force in electrostatic chucking | Sumanth Banda, Stephen Prouty | 2024-07-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus +1 more | 2024-01-23 |