Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163218 | Continuous liner for use in a processing chamber | Kenneth S. Collins, Kartik Ramaswamy | 2024-12-10 |
| 12144090 | Monolithic modular microwave source with integrated temperature control | Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus | 2024-11-12 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, Robert B. Moore, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 11935724 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more | 2024-03-19 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik, Philip Allan Kraus +1 more | 2024-01-23 |