Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125689 | Methods and apparatus for toroidal plasma generation | Kartik Ramaswamy, Andrew Nguyen, Yang Yang, Fernando Silveira, Yue Guo +1 more | 2024-10-22 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, Robert B. Moore, James D. Carducci, Richard Fovell, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 12020965 | Magnetic holding structures for plasma processing applications | Andrew Nguyen, Kallol Bera, Canfeng Lai | 2024-06-25 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II, Akshay Dhanakshirur +6 more | 2024-05-14 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Timothy Joseph Franklin, Kaushik Alayavalli, Akshay Dhanakshirur, Stephen C. Garner +1 more | 2024-04-16 |