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Symmetric plasma source to generate pie-shaped treatment |
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| 12020965 |
Magnetic holding structures for plasma processing applications |
Andrew Nguyen, Sathya Swaroop Ganta, Canfeng Lai |
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| 12002654 |
Modular high-frequency source |
Thai Cheng Chua, Christian Amormino, Hanh Nguyen, Philip Allan Kraus |
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| 11984302 |
Magnetic-material shield around plasma chambers near pedestal |
Job George Konnoth Joseph, Sathya Swaroop Ganta, Andrew Nguyen, Jay D. Pinson, II, Akshay Dhanakshirur +6 more |
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| 11959868 |
Capacitive sensor for monitoring gas concentration |
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| 11959174 |
Shunt door for magnets in plasma process chamber |
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| 11908662 |
Device and method for tuning plasma distribution using phase control |
Xiaopu Li, Edward P. Hammond, IV, Jonghoon Baek, Amit Kumar BANSAL, Jun Ma +1 more |
2024-02-20 |
