Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142458 | Symmetric plasma source to generate pie-shaped treatment | Anantha K. Subramani, Farzad Houshmand, Philip Allan Kraus, John C. Forster, Kallol Bera | 2024-11-12 |
| 12100579 | Deposition ring for thin substrate handling via edge clamping | Edwin C. Suarez, Harisha Sathyanarayana, Nataraj Bhaskar Rao, Siqing Lu | 2024-09-24 |
| D1038049 | Cover ring for use in semiconductor processing chamber | Harisha Sathyanarayana, Edwin C. Suarez, Siqing Lu, Nataraj Bhaskar Rao | 2024-08-06 |
| 11996315 | Thin substrate handling via edge clamping | Harisha Sathyanarayana, Edwin C. Suarez, Siqing Lu, Nataraj Bhaskar Rao | 2024-05-28 |
| 11940819 | Mass flow controller based fast gas exchange | Ravikumar Patil, Arun Chakravarthy Chakravarthy, Jon C. Farr, Saravanan Chandrabalu, Prabhuraj Kuberan | 2024-03-26 |
| 11881375 | Common substrate and shadow ring lift apparatus | Nataraj Bhaskar Rao, Siqing Lu, Ravikumar Patil | 2024-01-23 |