Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165877 | Methods for etching a material layer for semiconductor applications | Zhigang Wang, Jiao Yang, Heng Wang, Alfredo Granados, Ruizhe Ren | 2024-12-10 |
| 11940819 | Mass flow controller based fast gas exchange | Abhishek Chowdhury, Ravikumar Patil, Arun Chakravarthy Chakravarthy, Saravanan Chandrabalu, Prabhuraj Kuberan | 2024-03-26 |
| 11915940 | Method of depositing a pre-etch protective layer | Zhi-Gang Wang, Jiao Yang, Alfredo Granados, Heng Wang, Rui Ren | 2024-02-27 |