Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940819 | Mass flow controller based fast gas exchange | Abhishek Chowdhury, Arun Chakravarthy Chakravarthy, Jon C. Farr, Saravanan Chandrabalu, Prabhuraj Kuberan | 2024-03-26 |
| 11887811 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul | 2024-01-30 |
| 11887884 | Pre-loaded bowl mechanism for providing a symmetric radio frequency return path | Tuan Nguyen | 2024-01-30 |
| 11881375 | Common substrate and shadow ring lift apparatus | Abhishek Chowdhury, Nataraj Bhaskar Rao, Siqing Lu | 2024-01-23 |