Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100579 | Deposition ring for thin substrate handling via edge clamping | Abhishek Chowdhury, Edwin C. Suarez, Harisha Sathyanarayana, Siqing Lu | 2024-09-24 |
| D1038049 | Cover ring for use in semiconductor processing chamber | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Siqing Lu | 2024-08-06 |
| 11996315 | Thin substrate handling via edge clamping | Abhishek Chowdhury, Harisha Sathyanarayana, Edwin C. Suarez, Siqing Lu | 2024-05-28 |
| 11881375 | Common substrate and shadow ring lift apparatus | Abhishek Chowdhury, Siqing Lu, Ravikumar Patil | 2024-01-23 |