Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170186 | Showerhead assembly with heated showerhead | Seyyed A. Fazeli, Yang Guo, Chandrashekara Baginagere, Ramcharan Sundar, Yunho Kim +1 more | 2024-12-17 |
| 12142458 | Symmetric plasma source to generate pie-shaped treatment | Farzad Houshmand, Philip Allan Kraus, Abhishek Chowdhury, John C. Forster, Kallol Bera | 2024-11-12 |
| 12012652 | Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination | Kelvin Chan, Yang Guo, Ashish Goel, Philip Allan Kraus | 2024-06-18 |
| 11982359 | Isolation valve | Benjamin B. Riordon, Charles T. Carlson | 2024-05-14 |
| 11946140 | Hot showerhead | Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa, Steven Mosbrucker +5 more | 2024-04-02 |