Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185451 | Resonator, linear accelerator, and ion implanter having dielectric-free resonator chamber | Robert Brent Vopat | 2024-12-31 |
| 12170220 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, Rajkumar Thanu, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2024-12-17 |
| 12144101 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | Costel Biloiu, David Blahnik, Wai-Ming Tam, Frank Sinclair | 2024-11-12 |
| 12074042 | High-density substrate processing systems and methods | Jason M. Schaller, Steve Hongkham, Tuan Nguyen, Swaminathan Srinivasan, Khokan Chandra Paul | 2024-08-27 |
| 11985756 | Linear accelerator coil including multiple fluid channels | Robert Brent Vopat | 2024-05-14 |
| 11982359 | Isolation valve | Benjamin B. Riordon, Anantha K. Subramani | 2024-05-14 |
| 11948817 | Robot for simultaneous substrate transfer | Jason M. Schaller, Luke Bonecutter, David Blahnik | 2024-04-02 |
| 11895766 | Linear accelerator assembly including flexible high-voltage connection | David Blahnik, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2024-02-06 |