Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131948 | Techniques for void-free material depositions | M. Arif Zeeshan, Shantanu Kallakuri, Sony Varghese, John Hautala | 2024-10-29 |
| 12094707 | Plasma enhanced CVD with periodic high voltage bias | Travis Koh, Simon Huang, Philip Allan Kraus | 2024-09-17 |
| 12012652 | Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination | Yang Guo, Ashish Goel, Anantha K. Subramani, Philip Allan Kraus | 2024-06-18 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Yaoling Pan, Amir Bayati, Philip Allan Kraus +2 more | 2024-04-16 |
| 11956978 | Techniques and device structure based upon directional seeding and selective deposition | M. Arif Zeeshan, Shantanu Kallakuri, Sony Varghese | 2024-04-09 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Hanhong Chen, Philip Allan Kraus, Thai Cheng Chua | 2024-04-09 |
| 11886120 | Deposition of semiconductor integration films | Lakmal C. Kalutarage, Mark Saly, Bhaskar Jyoti Bhuyan, Thomas Knisley, Regina Freed +3 more | 2024-01-30 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2024-01-30 |