Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084771 | Control of liquid delivery in auto-refill systems | Zohreh Razavi Hesabi, Cong Trinh, Alexander V. Garachtchenko, Kenric Choi, Vipin Jose +3 more | 2024-09-10 |
| 11976363 | Purge ring for pedestal assembly | Muhannad Mustafa, Mario D. Silvetti | 2024-05-07 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Srinivas Gandikota, Joseph Yudovsky +1 more | 2024-01-30 |