Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094715 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Andrew Nguyen | 2024-09-17 |
| 11887856 | Enhanced spatial ALD of metals through controlled precursor mixing | Kelvin Chan, Yihong Chen, Kevin Griffin, Srinivas Gandikota, Joseph Yudovsky +1 more | 2024-01-30 |