Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094715 | Abatement and strip process chamber in a load lock configuration | Paul B. Reuter, Andrew Nguyen, Jared Ahmad Lee | 2024-09-17 |
| 11965241 | Cluster tools, systems, and methods having one or more pressure stabilization chambers | Saurabh Chopra, Masato Ishii, Sheng-Chen Twan, Srividya Natarajan | 2024-04-23 |