Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125689 | Methods and apparatus for toroidal plasma generation | Kartik Ramaswamy, Yang Yang, Sathya Swaroop Ganta, Fernando Silveira, Yue Guo +1 more | 2024-10-22 |
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Xue Yang Chang, Yu Lei, Xianmin Tang, John C. Forster, Yogananda Sarode Vishwanath +2 more | 2024-09-24 |
| 12094715 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Paul B. Reuter, Jared Ahmad Lee | 2024-09-17 |
| 12049961 | Chamber body design architecture for next generation advanced plasma technology | Bradley J. Howard, Nicolas Bright | 2024-07-30 |
| 12020965 | Magnetic holding structures for plasma processing applications | Sathya Swaroop Ganta, Kallol Bera, Canfeng Lai | 2024-06-25 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Jay D. Pinson, II, Akshay Dhanakshirur +6 more | 2024-05-14 |