| 12136537 |
Cost effective radio frequency impedance matching networks |
Yue Guo, Kartik Ramaswamy, Farhad Moghadam |
2024-11-05 |
| 12130561 |
Gas distribution plate with UV blocker |
Kartik Ramaswamy, Michael D. Willwerth |
2024-10-29 |
| 12125689 |
Methods and apparatus for toroidal plasma generation |
Kartik Ramaswamy, Andrew Nguyen, Sathya Swaroop Ganta, Fernando Silveira, Yue Guo +1 more |
2024-10-22 |
| 12111341 |
In-situ electric field detection method and apparatus |
Yue Guo, Kartik Ramaswamy, Fernando Silveira, A N M Wasekul AZAD |
2024-10-08 |
| 12106938 |
Distortion current mitigation in a radio frequency plasma processing chamber |
Yue Guo, Kartik Ramaswamy |
2024-10-01 |
| 12046449 |
Methods and apparatus for processing a substrate |
Yue Guo, Katsumasa Kawasaki, Kartik Ramaswamy, Nicolas Bright |
2024-07-23 |
| 12020901 |
RF impedance matching networks for substrate processing platform |
Yue Guo, Krishna Kumar Kuttannair, Jie Yu, Kartik Ramaswamy |
2024-06-25 |
| 11972924 |
Pulsed voltage source for plasma processing applications |
A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Fernando Silveira |
2024-04-30 |
| 11967483 |
Plasma excitation with ion energy control |
Yue Guo, Kartik Ramaswamy |
2024-04-23 |
