Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136537 | Cost effective radio frequency impedance matching networks | Yue Guo, Kartik Ramaswamy, Farhad Moghadam | 2024-11-05 |
| 12130561 | Gas distribution plate with UV blocker | Kartik Ramaswamy, Michael D. Willwerth | 2024-10-29 |
| 12125689 | Methods and apparatus for toroidal plasma generation | Kartik Ramaswamy, Andrew Nguyen, Sathya Swaroop Ganta, Fernando Silveira, Yue Guo +1 more | 2024-10-22 |
| 12111341 | In-situ electric field detection method and apparatus | Yue Guo, Kartik Ramaswamy, Fernando Silveira, A N M Wasekul AZAD | 2024-10-08 |
| 12106938 | Distortion current mitigation in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy | 2024-10-01 |
| 12046449 | Methods and apparatus for processing a substrate | Yue Guo, Katsumasa Kawasaki, Kartik Ramaswamy, Nicolas Bright | 2024-07-23 |
| 12020901 | RF impedance matching networks for substrate processing platform | Yue Guo, Krishna Kumar Kuttannair, Jie Yu, Kartik Ramaswamy | 2024-06-25 |
| 11972924 | Pulsed voltage source for plasma processing applications | A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Fernando Silveira | 2024-04-30 |
| 11967483 | Plasma excitation with ion energy control | Yue Guo, Kartik Ramaswamy | 2024-04-23 |