Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163911 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Daniel T. McCormick | 2024-12-10 |
| 12130561 | Gas distribution plate with UV blocker | Kartik Ramaswamy, Yang Yang | 2024-10-29 |
| 12068135 | Fast gas exchange apparatus, system, and method | Ming Xu, Ashley M. Okada, Duc Dang Buckius, Jeffrey Ludwig, Aditi MITHUN +1 more | 2024-08-20 |
| 12009191 | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall | Patrick Tae, Blake Erickson, Zhaozhao Zhu, Barry Craver | 2024-06-11 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Daniel Sang Byun, Philip Allan Kraus +5 more | 2024-06-11 |