| 12163911 |
Capacitive sensor housing for chamber condition monitoring |
Yaoling Pan, Patrick Tae, Leonard Tedeschi, Daniel T. McCormick |
2024-12-10 |
| 12130561 |
Gas distribution plate with UV blocker |
Kartik Ramaswamy, Yang Yang |
2024-10-29 |
| 12068135 |
Fast gas exchange apparatus, system, and method |
Ming Xu, Ashley M. Okada, Duc Dang Buckius, Jeffrey Ludwig, Aditi MITHUN +1 more |
2024-08-20 |
| 12009191 |
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
Patrick Tae, Blake Erickson, Zhaozhao Zhu, Barry Craver |
2024-06-11 |
| 12009236 |
Sensors and system for in-situ edge ring erosion monitor |
Yaoling Pan, Patrick Tae, Leonard Tedeschi, Daniel Sang Byun, Philip Allan Kraus +5 more |
2024-06-11 |
