Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163911 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Daniel T. McCormick | 2024-12-10 |
| 12123090 | Differential capacitive sensor for in-situ film thickness and dielectric constant measurement | Patrick Tae, Yaoling Pan | 2024-10-22 |
| 12094716 | Chambers and coatings for reducing backside damage | Kartik Ramaswamy, Benjamin Schwarz, Changgong Wang, Vahid Firouzdor, Sumanth Banda +1 more | 2024-09-17 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Daniel Sang Byun, Philip Allan Kraus +5 more | 2024-06-11 |